The C49 to C54 Phase Transformation in TiSi2 Thin Films
نویسندگان
چکیده
منابع مشابه
TIME-RESOLVED X-RAY DIFFRACTION STUDIES OF THE TEXTURE FORMATION KINETICS IN THE C49-C54 TiSi2 PHASE TRANSFORMATION
The transformation from the C49 to the C54 phase in TiSi2 thin films has been studied for more than a decade because of its importance to the semiconductor industry. In previous work we identified three dominant C54 orientations in TiSi2 thin films on Si(001) substrates using X-ray pole figure analysis. In the current study the evolution of the three prominent C54 texture components was further...
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ژورنال
عنوان ژورنال: Journal of The Electrochemical Society
سال: 1994
ISSN: 0013-4651,1945-7111
DOI: 10.1149/1.2054921